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The oldest definite millipede fossils
date back to the Middle
Silurian (late
Wenlock to early Ludlow) and Lower
Devonian (Lockhovia) of Scotland with their acme in the
Devonian and Late Carboniferous periods.
Millipedes played an important role in Palaeozoic
terrestrial ecosystems and were amongst the first animals to establish
terrestrial habitats. At least some species were fully terrestrial
by the, quite likely well before that. Their robust calcified
exoskeleton and burrowing habits greatly increase their chance
of preservation.

Millipede trackway.
(figure used with permission from Dennis C. Murphy)